Interesting name. :) I worked on developing compact models for the first few years of my employment at NXP Semiconductors, which is (for me, at least) the top result of a Google search for "compact models", defining them as "mathematical descriptions of semiconductor devices used in analog circuit simulators".
https://www.dutchnews.nl/2026/01/after-record-year-asml-is-t...
See also the statement from ASML (linked to in that article):
https://www.asml.com/en/news/press-releases/2026/strengtheni...