Embracing Chaos: The Imperfect Art of Semiconductor Manufacturing, Lithography(semianalysis.com)
semianalysis.com
Embracing Chaos: The Imperfect Art of Semiconductor Manufacturing, Lithography
https://www.semianalysis.com/p/embracing-chaos-the-imperfect-art
11 comments
What was surprising to me when I looked into it is the power usage of EUV lithography. The machine takes about 1 megawatt of input for about 200 watts of euv light! Not the most efficient, I always knew it was complicated making modern chips I didn’t realize it was so power hungry I believe TSMC is around 10% of Taiwans power usage.
Power efficient chips require huge amounts of power to make.
Power efficient chips require huge amounts of power to make.
I've a digital physical design engineer so I literally make the data for the mask layers.
The industry is so segmented that I know very little about the manufacturing side so I learned quite a bit from this.
The industry is so segmented that I know very little about the manufacturing side so I learned quite a bit from this.
OPC? It'd be great to talk about your area, because I bet most don't know what you do, and maybe I can make it an entertaining read.
I don't deal with OPC. That's handled after me. I mainly do floorplanning, place and route, static timing analysis, and write tons of scripts in Tcl for our CAD flow. This is a quick summary.
https://en.wikipedia.org/wiki/Physical_design_(electronics)
https://en.wikipedia.org/wiki/Physical_design_(electronics)
Just like even nuclear power plants are basically glorified steam engines, so is lithography basically glorified analog photography and I find that really weird and wonder if maybe there could be another way.
There is also electron beam lithography which draws the lines one by one instead of illuminating an entire die in one exposure.
For a very low density experiment and. A few other cases, it is an option. Or for mask writing.
It is very informative to consider the data rate. To approximate (and perhaps do bad phone math) lithography tool has ~1bit per 10nm^2, doing 1 field ever 20s. Or 600mm^2/20s. 30mm^2/s, or about 3E12 bits/s. That's amazing.
It is very informative to consider the data rate. To approximate (and perhaps do bad phone math) lithography tool has ~1bit per 10nm^2, doing 1 field ever 20s. Or 600mm^2/20s. 30mm^2/s, or about 3E12 bits/s. That's amazing.
A really good read. A lot of the discussion I could not really comprehend, but it's just mind blowing how complex chip manufacturing had become.
Serifs in font design serve a similar purpose to OPC.
In college I studied art, doing mostly photography, and some printmaking. The processes of making photo resists for screen printing or intaglio have a lot of commonalities to the rudimentary elements of semiconductor construction, but there's one technique in printmaking that goes a lot farther in its parallels.
Photogravure is an intersection of photographic ( drawing with light ) and printing plate processes. A positive transparency ( sometimes called an inter-positive if made from a negative ) is used to expose a photosensitive emulsion applied to a (usually copper, sometimes zinc) printing plate. The emulsion is a "resist" in that it hardens on exposure, and once the non-hardened material is washed off the plate is etched to remove surface material from the plate where the resist has not hardened over it.
Once etched to the printer's desired depth, the resist is washed off. The grooves of the plate will then hold ink relative to their depth and width.
A printer may repeat the emulsion, exposure, etching (with test printing along the way, inking and printing to confirm that the image is as expected) cycle several times to build up the line quality needed in an image, often starting with the heavier line work or darker "ground" areas of the image and building up to the finer line and lighter textures. Alternatively, while etching, the acid solution may be washed from the plate and finer work painted over by a new layer of rosin-based resist to keep them from further etching.
There are fun parallels between inking and doping, but multi-color prints would be built up and printed from separate plates or states of plates.
It's important for us computery folks to remember that just because the kernel of a process is ages old, doesn't mean it isn't sophisticated or high-craft.
After all, there is nothing new under the sun, but if you can find a way to present something in a new light, that's innovation.